SUSS 热板/显影机 HP8

Wafer Size

Up to 200 mm round or 6" square

User Interface

Dedicated touch panel controller

# of Recipes

max. 200

# of Steps/Recipe

max. 40

Step Time

0 - 999s in 1s steps

Optional User Interface

Via controller of SUSS RCD8 tool

# of Recipes

>1000

# of Steps/Recipe

max. 50

Step Time

0 - 999s in 1s steps