欢迎光临~香港垒为信息科技实业有限公司

产品展示

  • 德国SUSS 紫外光刻机 MJB4
1247c253219b98f6a18735aa77.png

德国SUSS 紫外光刻机 MJB4

    MJb4型号紫外光刻机是德国SUSS公司生产的手动型光刻机,在全球相关科研领域的实验室有广泛的应用。该设备配备可靠的在亚微米级高度精密的对准以及高分辨光刻系统。具备顶部对准系统和衍射减小光学系统。
  • 在线订购

Perfect Low-Cost Solution:

  High Accuracy

  Good Optical performance

  latest processes (e.g. UV-NIL)

Addressed Markets:

  MEMS

  Telecommunications

  Compound Semiconductors

  Nano Imprint Lithography

Manual Tool: Easy To Operate

Technical Data

  Wafer size: 1′′ up to 100 mm / 4′′ (round)

  Min. pieces: 5 x 5 mm

  Wafer thickness: up to 4 mm

  Mask size: standard 2′′ x 2′′ up to 5′′ x 5′′ (SEMI)

  Mask thickness: up to 4.8 mm / 190 mil

Exposure Modes

  Contact: soft, hard, vacuum, soft vacuum

  Proximity up to 50μm gap

Optics

  UV250, UV300, UV400 and broadband optics

  Intensity Uniformity ± 3% on 100mm

  Constant power or constant intensity

  Lamp sizes: 200W, 350W, 500W (for UV250)

  Resolution down to 0,5 μm L/S (vacuum contact, UV250)

Alignment

  TSA alignment accuracy: 0.5μm (with SUSS recommended wafer targets)

  Transmitted IR Alignment accuracy: < 5μm (<2μm under special process conditions)

  Alignment gap:10–50μm

Single or splitfield microscope with/w/o CCD camera


联系我们

联系人:张经理

手机:13585708751

公司地址:香港九龍長沙灣青山道538號半島大廈1005室

TEL : 852-3568 7193 / 3568 7936

上海办事处地址: 上海市虹口区水电路1422号1801室

电话:021-65113271

邮箱:zhangzengxi@leiruitech.com.cn


用手机扫描二维码关闭
二维码